oxygen-gas plasma stripping

fotorezisto šalinimas deguonies plazmoje statusas T sritis radioelektronika atitikmenys: angl. oxygen-gas plasma stripping vok. Ablösen des Resists im Sauerstoffplasma, n rus. удаление фоторезиста в кислородной плазме, n pranc. élimination du photorésist en plasma d'oxygène, f

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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